Design and Optimization Analysis of a Novel MEMS Micro-Hotplate for Gas Sensor

Xiao Bo Zhang; Chang Bai Liu; Li Liu; Yue He; Lian Yuan Wang

doi:10.4028/www.scientific.net/AMR.791-793.1014

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 791-793Design and Optimization Analysis of a Novel MEMS...

Design and Optimization Analysis of a Novel MEMS Micro-Hotplate for Gas Sensor

Abstract:

The paper presents a novel Si-substrated micro-hotplate for gas sensor. Use platinum filament as heater, SiO₂ as thermal and electricity insulation. Through optimizing analysis, in order to make the gas sensor obtain perfect properties of higher temperature and uniform temperature distribution, the thickness of SiO₂, thickness of Si substrate, electrode width and electrode space are designed to be 50, 250, 20 and 500 μm, respectively. Via the analysis of magnetic field distribution of the new gas sensor, the new electrode structure can eliminate the interference on the measurement signal from magnetic field, which is benefit for the improvement of sensor performance.

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Periodical:

Advanced Materials Research (Volumes 791-793)

Pages:

1014-1017

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.791-793.1014

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Online since:

September 2013

Authors:

Xiao Bo Zhang, Chang Bai Liu, Li Liu, Yue He, Lian Yuan Wang

Keywords:

ANSYS, Magnetic Field Distribution, Micro-Hotplate, Temperature Distribution

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