Electrical Properties Dependence on Substrate Temperature of Sputtered ZnO Nanoparticles Thin Films on Teflon Substrates

Abstract:

Zinc oxide (ZnO) thin films were deposited on teflon substrates by RF magnetron sputtering at different substrate temperature. The effect of substrate temperature on ZnO thin films electrical and structural properties were examined using current-voltage (I-V) measurement, and x-ray diffraction (XRD) It was found that the electrical conductivity and resistivity of the ZnO thin film deposited at 40°C was the highest and lowest intensity accordingly. This was supported by the crystalline quality of the films from the x-ray diffraction (XRD) results. The XRD pattern showed that the ZnO thin film deposited at 40°C has the highest intensity with the narrowest full-width-at-half-maximum indicating that the film has the highest quality compared to other thin film.

• Periodical: Advanced Materials Research (Volume 795)
• Pages: 403-406
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.795.403
• Online since: September 2013
• Authors: Nur Sa’adah Muhamad Sauki, Sukreen Hana Herman, Mohd Hanafi Ani, Mohamad Rusop
• Keywords: Flexible Substrate, RF Magnetron Sputter, Substrate Temperature, ZnO Thin Films

References

[1] Y.J. Lee, J.W. Bae, H.R. Han, J.S. Kim and G.Y. Yeon, "Dry etching characteristics of ITO thin films deposited on plastic substrates" Thin Solid Films, vol.383, p.281, (2001)

DOI: 10.1016/s0040-6090(00)01578-9

[2] D.H. Kim, M.R. Park and G.H Lee, "Preparation of high quality ITO films on a plastic substrate using RF magnetron sputtering", Surf. & Coat. Technology, vol. 201, p.927, (2006)

DOI: 10.1016/j.surfcoat.2006.01.004

[3] Y.Y. Liu, Y.Z. Yuen, C.F.Li, X.T. Gao X.Z. Cao, and J.B.Li, "The structure and photoluminescence properties of RF sputtered films of ZnO on Teflon substrate", Mater. Lett, vol. 62, p.2907, (2008)

DOI: 10.1016/j.matlet.2008.01.070

[4] N.N. Jandow K.A. Ibrahim H.A. Hassan, S.M. Thahab, and O.S. Hamad, "The electrical properties of ZnO MSM photodetector with Pt contact electrodes on PPC plastic"I, J. Elect. Dev, vol. 7, p.225, (2010)

DOI: 10.1016/j.cap.2010.05.012

[5] H.Ahn, J.H. Park, S.B. Kim, S.H. Jee, Y.S. Yoon, and D.J. Kim, "Vertically Aligned ZnO Nanorod Sensor on Flexible Substrate for Ethanol Gas Monitoring", Electrochem. Solid State Lett., vol. 13, p.125, (2010)

DOI: 10.1149/1.3479692

[6] Dalong Zhao  Mourey, D.A.  Jackson, T.N., "Fast Flexible Plastic Substrate ZnO Circuit", Elec. Dev. Lett., vol.3, p.323, (2010)

DOI: 10.1109/led.2010.2041321

[7] Z L Pei, X B Zhang, G P Zhang, J Gong, C Sun, R F Huang, L S Wen, " Transparent conductive ZnO:Al thin films deposited on flexible substrates prepared by directcurrent magnetron sputtering", Thin Solid Films, vol. 497, p.20, (2006)

DOI: 10.1016/j.tsf.2005.09.110

[8] A. A. Abd Halim, H. Hashim , M. Rusop, M. H. Mamat and A. S. Zoolfakar, "Study on Electrical Properties of Zinc Oxide Thin Film", IEEE Conference on Innovative Technologies in Intelligent Systems and Industrial Applications , p.123, (2008)

DOI: 10.1109/citisia.2008.4607347

[9] S.Fernandez and F.B. Naranjo, "Optimization of aluminum-doped zinc oxide films deposited at low temperature by radio-frequency sputtering on flexible substrates for solar cell applications", Sol. Ener. Mater, & Sol. Cells, vol.94, p.157, (2010)

DOI: 10.1016/j.solmat.2009.08.012

[10] N.S.M. Sauki, S.H. Herman, and M.R. Mahmood, "Substrate Temperature dependence of Nanoparticle ZnO Thin Films Deposited on Flexible Substrates by RF Magnetron Sputtering", International Con. on Enabling Sci. and Nanotechnology, D.O.I: 10.1109/ESciNano.2012.6149676 , (2012)

DOI: 10.1109/escinano.2012.6149676

[11] Y.Y. Liu, Y.Z. Yuan, X.T. Gao, S.S. Yan, X.Z. Cao, G.X. Wei, "Deposition of ZnO thin film on polytetrafluoroethylene substrate by the magnetron sputtering method", Materials Letters, vol.61, p.4463, (2007)

DOI: 10.1016/j.matlet.2007.02.020

[12] N.N. Jandow, F.K. Yam, S.M. Thahab, K. Ibrahim, H. Abu Hassan, "The characteristics of ZnO deposited on PPC plastic substrate", Materials Letters, vol. 64, p.2366, (2010)

DOI: 10.1016/j.matlet.2010.07.025