Analysis on the Contact Mechanics between Tip and Sample in Atomic Force Acoustic Microscope Method

Article Preview

Abstract:

Atomic force acoustic microscopy (AFAM) is a technique combining the atomic force microscope (AFM) and ultrasonic technique, where the cantilever or the sample surface is vibrated at ultrasonic frequencies while a sample surface is scanned with the sensor tip contacting the sample. At a consequence, the amplitude of the cantilever vibration as well as the shift of the cantilever resonance frequencies contain information about local tip-sample contact stiffness and can be used as imaging quantities. It has been demonstrated to be a powerful tool for the investigation of the local elastic prosperities of sample surface. The sample is tested in the contact mode, the resonant frequency of the cantilever is measured, by which the contact stiffness is calculated based on the model of vibration of the cantilever, and then the elastic property of sample is evaluated according to the contact theory. Therefore, the contact model has an important impact on the calculation of elastic modulus. This paper analyzes the contact model between the AFM probe and the sample, and it is investigated based on finite element method (FEM) that the results of the test are affected by parameters.

You might also be interested in these eBooks

Info:

Periodical:

Pages:

325-329

Citation:

Online since:

September 2013

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2013 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

[1] S.Z. Wen. Nano Tribology. Beijing: Tsinghua University press, (1998).

Google Scholar

[2] W. D. Nix Mechanical Properties of Thin Films. Metall Trans, 1989, 20A (11): 2217~2245.

Google Scholar

[3] U. Rabe, W. Arnold. Atomic Force Mictoscopy at Ultrasonic Frequencies. Ultrasonics Symposium. 1994: 367~370.

Google Scholar

[4] D.C. Hurley, M. Kopycinska Muller and A.B. Kos. Mapping Mechanical Properties on the Nanoscale Using Atomic-Force Acoustic Microscopy. Scanning Probe Microscopy for Materials Science, 2007, 59(1): 23~29.

DOI: 10.1007/s11837-007-0005-8

Google Scholar

[5] C. F. He., G. M Zhang and B. Wu, Quantitative measurement of local elasticity of SiOx film by atomic force acoustic microscopy. Chinese Physics B, 2010, 19(8): 084302.

DOI: 10.1088/1674-1056/19/8/084302

Google Scholar

[6] C.F. He, G.M. Zhang, B. Wu, Z. Q, Wu. Subsurface defect of the SiOx film imaged by atomic force acoustic microscopy . Optics and Lasers in Engineering, 2010, 48(11): 1108~1112.

DOI: 10.1016/j.optlaseng.2009.12.014

Google Scholar

[7] W. Zhao., Quantitative measurement of nanomechanical properties in composite materials (M), Stony Brook University, 2010. 5.

Google Scholar

[8] H.J. Hertz. On the contact of elastic solids. ReineAngew. Math92, 156(1882).

Google Scholar

[9] T. Tsuji, S. Saito, K. Fukud and K. Yamanak. Significant stiffness reduction at ferroelectric domain boundary evaluated by ultrasonic atomic force microscopy. Applied Physics Letters. 2005, 87: 07190901~03.

DOI: 10.1063/1.2012537

Google Scholar

[10] G. G. Yaralioglu, F. L. Degertekin, K. B. Crozier and C. F. Quate. Contact stiffness of layered materials for ultrasonic Atomic force microscopy. Journal of Applied Physics. 2000, 87(10): 7491~7496.

DOI: 10.1063/1.373014

Google Scholar