Research and Development of a Novel DeviceNet-Oriented Interface System for IC Equipment

Ni Jin; Ai Dong Xu; Ming Zhe Liu; Kai Wang

doi:10.4028/www.scientific.net/AMR.816-817.928

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 816-817Research and Development of a Novel...

Research and Development of a Novel DeviceNet-Oriented Interface System for IC Equipment

Abstract:

At present, the interface system in IC equipment control software system has to be changed even when a small hardware change occurs, which increases the time and cost of system debugging. This is one of the technical problems needed to be solved in course of development of IC equipment control system software.Therefore, the characteristics of the semiconductor device in IC equipment which used the DeviceNet has been analyzed in this paper. Then one DeviceNet-Oriented interface system, which is capable of shielding the difference of the details of the hardware, has been designed and developed.

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Periodical:

Advanced Materials Research (Volumes 816-817)

Pages:

928-932

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.816-817.928

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Online since:

September 2013

Authors:

Ni Jin, Ai Dong Xu, Ming Zhe Liu, Kai Wang

Keywords:

Devicenet, IC Equipment, Interface System

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References

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