[1]
C. E. Kim and I. Yun, Effects of the interfacial layer on electrical characteristics of Al2O3/TiO2/Al2O3 thin films for gate dielectrics, Appl. Surf. Sci. 258 (2012) 3089-3093.
DOI: 10.1016/j.apsusc.2011.11.043
Google Scholar
[2]
F. M. Pontes, E. R. Leite, E. J. H. Lee, E. Longo, and J. A. Varela, Dielectric properties and microstructure of SrTiO3/BaTiO3 multilayer thin films prepared by a chemical route, Thin Solid Films 385 (2001) 260-265.
DOI: 10.1016/s0040-6090(01)00772-6
Google Scholar
[3]
D. Peng and Z. Meng, Influence of buffer layer on dielectric properties of (Ba1-xSrx)TiO3 thin films, Microelectron. Eng. 66 (2003) 631-636.
DOI: 10.1016/s0167-9317(02)00975-9
Google Scholar
[4]
S. W. Jeong, H. J. Lee, K. S. Kim, M. T. You, Y. Roh, T. Noguchi, W. Xianyu, and J. Jung, Effects of annealing temperature on the characteristics of ALD-deposited HfO2 in MIM capacitors, Thin Solid Films 515 (2006) 526-530.
DOI: 10.1016/j.tsf.2005.12.288
Google Scholar
[5]
A. Bajolet, J. P. Manceau, S. Bruyère, R. Clerc, M. Proust, N. Gaillard, J. C. Giraudin, P. Delpech, L. Montès, and G. Ghibaudo, Impact of TiN post-treatment on metal insulator metal capacitor performances, Microelectron. Eng. 83 (2006) 2189-2194.
DOI: 10.1016/j.mee.2006.10.004
Google Scholar
[6]
T.-M. P. Somnath Mondal, High-performance Ni/Lu2O3/TaN metal-insulator-metal capacitors, IEEE Device Letters. 32 (2011) 1576-1578.
DOI: 10.1109/led.2011.2163611
Google Scholar
[7]
I.-S. H. Hyuk-Min Kwon, Sang-Uk Park, Jung-Deuk Bok, Yi-Jung Jung, Hong-Sik Shin, Chang-Yong Kang, Byoung-Hun Lee, Raj Jammy, Ga-Won Lee and Hi-Deok Lee, Conduction mechanism and reliability characteristics of a metal-insulator-metal capacitor with single ZrO2 layer, Jpn. J. Appl. Phys. 50 (2011).
DOI: 10.1109/led.2011.2114633
Google Scholar
[8]
R. S. G. Nabiyouni, M. Toghiany, M. H. Majles Ara and K. Hedayati, Preparation and characterization of nanostructured ZnS thin films grown on glass and N-type Si substrates using a new chemical bath deposition technique, Rev. Advance Material Science, 27 (2011) 52-57.
Google Scholar
[9]
D. S. Boyle, O. Robbe, D. P. Halliday, M. R. Heinrich, A. Bayer, P. O'Brien, D. J. Otway, and M. D. G. Potter, A novel method for the synthesis of the ternary thin film semiconductor cadmium zinc sulfide from acidic chemical baths, Journal of Materials Chemistry 10 (2000) 2439-2441.
DOI: 10.1039/b005544l
Google Scholar
[10]
M. Soosen Samuel, J. Koshy, A. Chandran, and K. C. George, Dielectric behavior and transport properties of ZnO nanorods, Physica B: Condensed Matter 406 (2011) 3023-3029.
DOI: 10.1016/j.physb.2011.04.070
Google Scholar
[11]
D. Q. Y. H. M. Zhou, Z. M. Lu, L. R. Xiao and J. Li, Preparation of aluminum doped zinc oxide films and the study of their microstructure, electrical and optical properties, Thin Solid Films. 515 (2007) 6909-6914.
DOI: 10.1016/j.tsf.2007.01.041
Google Scholar
[12]
T. F. T. Tagawa, K. Nakamura, Increase in resistivity of indium-tin-oxide films spin coated on titanium dioxide, International Meeting for Future of Electron Devices (2011).
DOI: 10.1109/imfedk.2011.5944870
Google Scholar