Calculation of Energy Release Function of Ion Beam in Solids

Abstract:

The mathematical formulation of space-time energy release function of accelerated ions in solids is presented. High-power pulsed ion beam and continuous focused ion beam interaction with metals are considered. The power density of deposited energy and specific energy input in a target have been calculated. A beam energy fraction expended on the collisional sputtering of target atoms has been estimated.

• Periodical: Advanced Materials Research (Volume 880)
• Pages: 7-12
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.880.7
• Online since: January 2014
• Authors: Xeniya Ryabkina, Olga Stepanova*
• Keywords: Energy Release, Focused Ion Beam (FIB), High-Power Pulsed Ion Beam

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