6D Laser Measurement System Based on Double Longitudinal Modes Laser

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Abstract:

In order to solve the problem about the requirements of CNC equipments high speed measuring and simultaneous measurement of Multi-dimensional parameters accurately, this research describes the 6 D laser measurement system based on two-longitudinal modes thermal frequency stabilization laser. Because it launches two polarized light which is perpendicular to each other and the differences between the frequencies are big enough, it has high measurement speed (can be reach 1.3m/s) and can measure roll angle with high accuracy, which is the shortage of the existing 5D/6D multi-dimensional laser interferometer.

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Advanced Materials Research (Volumes 887-888)

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1317-1322

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February 2014

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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