High Performance Current-Voltage Characterization System for High Resistance Materials

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Abstract:

The resistivity measurement finds many applications in semiconductors and insulating materials characterization. Conventional digital multimeter can provide resistance measurement up to about 10-200MΩ. However, in some cases, resistances in gigaohms (GΩs) and higher ranges need to be measured accurately. To measure the resistance of high resistivity materials, a programmable voltage source (-100V to +100V) combined with an electrometer system (100pA 10mA) have been built. The electrometer system and programmable voltage source have been calibrated with a calibrator (Fluke 5100B series) and digital multimeter (Fluke 8808A). Materials resistance up to 10 GΩ can be obtained by measuring the current-voltage (I-V) characteristics. It is found that the I-V curve of the 10 GΩ resistor fits very well the linear function with a high linear regression coefficient R2 of 0.999.

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710-713

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February 2014

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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