The Research of the Zn₂TiO₄ Films Grown by Magnetron Sputtering

Abstract:

The uniform and transparent Zn₂TiO₄ series thin films were successfully deposited on medical glass slide by magnetron sputtering. The influences of the Zn-doped quantity and annealing treatment on films properties were investigated. Film structure, surface morphologies and optical properties were measured with XRD, SEM and UV-VIS transmittance spectroscope. The results show that the Zn-doped quantity and annealing treatment have influence on the absorption edges. The absorption edges of the films can increase 10nm after annealing treatment. The intensity of c-series ZnTiO₃ diffraction peaks is higher, which may be that the grain size is bigger and the crystallization is complete. The annealing treatment not only growing up grain size of composite films, but also the surface films have tiny crack phenomenon.

• Periodical: Advanced Materials Research (Volume 900)
• Pages: 415-418
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.900.415
• Online since: February 2014
• Authors: Shu Juan Zhang, Ming Sheng Li, Shang Lin Feng, Chong Cao
• Keywords: Annealing Treatment, Composite Film, Magnetron Sputtering, Zn-Doped Quantity

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