Cathodic Arc Evaporated CrAlSiN Coatings with Multi-Cycle Depositions

Yen Shuo Chang; Wei Yu Ho; Po Yi Tsou; Cheng Liang Lin

doi:10.4028/www.scientific.net/AMR.900.517

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 900Cathodic Arc Evaporated CrAlSiN Coatings with...

Cathodic Arc Evaporated CrAlSiN Coatings with Multi-Cycle Depositions

Abstract:

CrAlSiN film possesses superior hardness, good thermal and chemical stability due to its multi-component constituents and unique structure. To further explore the reproducibility and scale-up thickness of CrAlSiN coatings, the multi-cycle deposition of CrAlSiN coatings by cathodic arc evaporation was conducted in this study in order to evaluate the effect of coating thickness on the properties of CrAlSiN coated materials. Two targets of Al_0.8Si_0.2 and Cr (99.99 at%) along with altering deposition cycles were used for the coatings. The results showed that the CrAlSiN coatings had an increase in hardness up to 4700 HV_50g confirmed by Vickers hardness tests. Surface roughness of the coatings could be dramatically improved by erosion tests as a result of removing droplets and higher asperities on the coating surface.

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Periodical:

Advanced Materials Research (Volume 900)

Pages:

517-521

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.900.517

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Online since:

February 2014

Authors:

Yen Shuo Chang, Wei Yu Ho, Po Yi Tsou, Cheng Liang Lin

Keywords:

Cathodic Arc Evaporation, CrAlSiN Coating, Erosion

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