Analysis of Microvibration of a Microelectronics Workshop under Multipoint Excitation

Abstract:

This paper simulated the microvibration response of a micro-electronic workshop by using the finite element analysis software Sap2000. Based on the measured vibration signals as input data at the base, the displacement and velocity curves at some typical points on the work platform of a micro-electronic workshop under uniform and multipoint excitation were obtained. The results show that displacement responses at nodes of beams or in the direction of lower stiffness under multipoint excitation are much greater than those under uniform excitation, while there are no marked difference in the peak values of velocities.

• Periodical: Advanced Materials Research (Volume 904)
• Pages: 496-499
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.904.496
• Online since: March 2014
• Authors: Zi Xue Lei*, Qiao Zheng Ma, Teng Jiao Qiu
• Keywords: Microvibration Response, Multipoint Excitation, Time History Analysis

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