For Libraries For Publication Open Access Downloads About Us Contact Us
Paper Titles
The Effect of Inlet Conditions on Particle Deposition in Axial Flow Compressor
p.1066
The Reductive Method of Copper and the Optimization of Oxygen Dosing in the Reduction Tube of Vario EL III Elemental Analyzer
p.1070
Thermal Stress Analysis of the Die during High Pressure Casting
p.1074
Droplet Transfer Analysis of Intermittent Pulsed Arc Welding Used to Repair the Metal Defects
p.1078
Compact and Precise Gonio-Stage for Thin Film Measurements by Using Glancing Incident Synchrotron X-Ray
p.1082
The Antiplane Shearing Problem of Circular Holes with 2k Periodic Cracks in One-Dimensional Hexagonal Quasicrystals
p.1086
Research of the Finishing Needle Automatic Processing Based on the LabVIEW
p.1096
Adsorption Characteristics of Different Stratification in the Coal Reservoirs of Southern Qinshui Basin and its Main Controlling Factors
p.1103
Coal Reservoir Property Differences Analysis of Different Macrolithotype in Liulin Mining Area
p.1108

Compact and Precise Gonio-Stage for Thin Film Measurements by Using Glancing Incident Synchrotron X-Ray

Article Preview

Abstract:

A Compact and precise gonio-stage for Grazing incidence X-ray absorption fine structure (GIXAFS) measurement is presented in this paper. The gonio-stage can provide a range of 0-35mrad and a resolution of 0.012mrad. An expert alignment can be realized automatically by computer program to obtain precise initial condition. An accuracy verification test of angle control carried out on BL7C station in KEK gives a satisfied result. At last, high quality GIXAFS spectra for 200nm thick HfO2/Si thin film were obtained.

You might also be interested in these eBooks
Advanced Engineering Research (IFMME) View Preview

Info:

Periodical:

Advanced Materials Research (Volumes 915-916)

Pages:

1082-1085

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.915-916.1082

Citation:

Cite this paper

Online since:

April 2014

Authors:

Jiang Wei Fan*, Xiao Gang Han, Mei Quan Liu

Keywords:

GIXRR, Gonio-Stage, HfO2, Ultra-Thin Film

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2014 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

* - Corresponding Author

References

[1] Z. Xie, I. Kojima, S. Q. Wei, Physica Scripta. T115 (2005) 784-789.

Google Scholar

[2] M. A. Denecke, J. Rothe, K. Dardenne, Phys. Chenm. 5 (2003) 939-944.

Google Scholar

[3] D.C. Koningsberger, R. Prins, X-ray Absorption: Principles, Applications, Techniques of EXAFS, SEXAFS and XANES (Wiley, New York, 1988).

DOI: 10.1002/nadc.19880360617

Google Scholar

[4] M. shirai, M. Nomura and Yasuhiro Iwasawa, Rev. Sci. Instrum. 66 (1995) 5493-5498.

Google Scholar

[5] F. D'Acapito, I. Davoli and P. Ghigna, J. Synchrontron Rad 10 (2003) 260-263.

Google Scholar

[6] A.D. Smith, M.D. Roper, and H.A. Padmore, Nuclear Instuments and Methods in physics Research B 97 (1995) 579-583.

Google Scholar

[7] H. Oyanagi, I. Owen and M. Grimshaw, Rev. Sci. Instrum. 66 (1995) 5477-5481.

Google Scholar

[8] D.T. Jiang, N. Alberding, and A.J. Seary, Rev. Sci. Instrum. 59 (1988) 60-66.

Google Scholar

[9] Information on http: /hence. lbl. gov/optical_constants.

Google Scholar

[10] L.G. Parratt, Phys. Rev. 95 (1954) 359-365.

Google Scholar

© 2025 Trans Tech Publications Ltd. All rights are reserved, including those for text and data mining, AI training, and similar technologies. For open access content, terms of the Creative Commons licensing CC-BY are applied.
Scientific.Net is a registered trademark of Trans Tech Publications Ltd.