Experimental Studies on Triple-Chamber Piezoelectric Pump with Triple Vibrators under Different Working Modes

Abstract:

The structure and working principle of serial-connection 3-chamber PZT pump was introduced, and the output performance of the PZT pump was analyzed under different working modes. The pump was tested, respectively, first with each of the three actuators at different location being actuated solely, and then with random two of the three actuators at different location being actuated (in anti-phase) synchronously. The test results show that changing the driving strategy can change the output performance of the piezoelectric pump, with the structural parameters, working parameters and connection Strategy determined. At a voltage of 150 V, the maximal flowrate and optimal working frequencies for the pump under working mode of left, middle, right chambers actuated solely are 9/7.5/11 ml/min and 260/380/720 Hz respectively. The maximal flowrate and the optimal working frequency for the pump under working mode of left and middle chambers/middle and right chambers actuated synchronously are 17/28 ml/min and 460/600 Hz respectively.

• Periodical: Advanced Materials Research (Volumes 915-916)
• Pages: 366-371
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.915-916.366
• Online since: April 2014
• Authors: Bing Han, Zhong Hua Zhang, Shu Yun Wang, Jun Wu Kan*, Ze Hui Ma, Hang Kai Zhu
• Keywords: Performance, PZT Pump, Serial-Connection, Working Mode

References

[1] D.J. Laser, J.G. Santiago, A review of micropumps, J. Micromech. Microeng. 14 (2004) R35-R64.

DOI: 10.1088/0960-1317/14/6/r01

[2] P. Woias, Micropumps—past, progress and future prospects, Sens. Actuators B 105 (2005) 28-38.

DOI: 10.1016/s0925-4005(04)00108-x

[3] Amos Ullmann. The piezoelectric valve-less pump —performance enhancement analysis [J]. Sensors and Actuators A, 1998, 69: 97-105.

DOI: 10.1016/s0924-4247(98)00058-2

[4] S. Matsumoto, A. Klein and R. Maeda. Development of bi-directional valve-less micropump for liquid [C]. Proc. IEEE MEMS, 1999: 141-146.

DOI: 10.1109/memsys.1999.746791

[5] Nam-Trung Nguyen, Thai-Quang Truong. A fully polymeric micropump with piezoelectric actuator. Sensors and Actuators B, 2004, 97: 137~143.

DOI: 10.1016/s0925-4005(03)00521-5

[6] Böhm S, Olthuis W and Bergveld P. A plastic micropump constructed with conventional techniques and materials. Sensors and Actuators. 1999, 77: 223~228.

DOI: 10.1016/s0924-4247(99)00192-2

[7] H.Q. Li, D.C. Roberts, J.L. Steyn, et al. A high frequency high flow rate piezoelectrically driven M EMS micropump [C]. Proceeding IEEE Solid State Sensors and Actuators Workshop, Hilton Head. June, (2000).

DOI: 10.31438/trf.hh2000.17

[8] Junwu Kan, Renqiu Cao, Zhigang Yang, Guangming Cheng. Structure design and performance analysis of a piezoelectric pump [A]. Piezoelectric & Acoustooptics, 2002, 24(5); 368-371 (in Chinese).

[9] Junwu Kan, Zhigang Yang, Shunming Hua, Guangming Cheng. Study on performance of a check-valved piezoelectric pump [A]. Journal of Agricultural Machinery, 2003, 34(5); 84~87 (in Chinese).

[10] Junwu Kan， Zhigang Yang, Taijiang Peng， et al. Design and test of a high performance piezoelectric micropump for drug delivery［J］. Sensors and Actuators A：Physical, 2005, 121(1): 156-161.

DOI: 10.1016/j.sna.2004.12.002