Study on the Structural Properties of Polycrystalline Er2O3 Films on SI(001) Substrates by Raman Spectra

Jun Chao Wang; Yan Yan Zhu

doi:10.4028/www.scientific.net/AMR.953-954.1091

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 953-954Study on the Structural Properties of...

Study on the Structural Properties of Polycrystalline Er₂O₃ Films on SI(001) Substrates by Raman Spectra

Abstract:

The Raman spectra of polystalline Er₂O₃ films on Si (001) substrates annealed at different temperatures in O₂ atmosphere were investigated. Seven Raman lines are identified in annealed Er₂O₃ films on Si (001) substrates. Two broad peaks larger than 600 cm^-1 are detected, and their origination is discussed. Raman spectroscopy is proved to be a simple and sensitive method to characterize the structures of Er₂O₃ films on Si substrates.

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Advanced Materials Research (Volumes 953-954)

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1091-1094

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https://doi.org/10.4028/www.scientific.net/AMR.953-954.1091

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June 2014

Authors:

Jun Chao Wang, Yan Yan Zhu

Keywords:

Raman Spectra, Rare Earth Oxides

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