The present study is a continuation of the previous research on direct metal part fabrication with hybrid plasma-laser deposition manufacturing (PLDM). It is remarkably important for manufacturing high accurate part to investigate the factors influencing the precision of deposited layer and obtain the influence rules. Many factors perhaps affect the layer precision, such as average power of laser, repetition frequency, pulse width, hybrid angle between laser beam and plasma beam, speed of powder feed, deposition speed, and amount of feed along Z direction and so on. In this paper, the factors except laser parameters published in other paper were researched experimentally. The results were concluded as follows: (1) The width of the layer increases and the thickness decreases with the increasing of hybrid angle. (2) The depth of layer increases with the increasing of the amount of powder feed but the width of layer is nearly unchanged. (3) The width and thickness of layer reduces with the increasing of deposition speed. (4) The deviation between the amount of feed along Z direction and the depth of depositing layer makes the part precision decrease.