Study on a Capacitive Micro-Mechanic Gyroscope

Yun Bo Shi; Qiu Lin Tan; Qiong Zhang; Jun Liu

doi:10.4028/www.scientific.net/AMR.97-101.4478

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 97-101Study on a Capacitive Micro-Mechanic Gyroscope

Study on a Capacitive Micro-Mechanic Gyroscope

Abstract:

A micro-mechanic gyroscope design, which is used electrostatic comb driven, grid structure and capacitive detection, as well as its working principle, was proposed. Simulation and mode analysis using ANSYS were done while the simulation was consistent with theory. This gyroscope was designed and manufactured by body silicon technique, and after packaged, we got this gyroscope finally. The preliminary experiment test result showed that the first natural frequency is 4.06 kHz, and its sensitivity is 0.0279V//s.

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Periodical:

Advanced Materials Research (Volumes 97-101)

Pages:

4478-4481

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.97-101.4478

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Online since:

March 2010

Authors:

Yun Bo Shi, Qiu Lin Tan, Qiong Zhang, Jun Liu

Keywords:

Capacitance, Comb-Drive Electrostatic Structure, Gyroscope

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