Study on a Capacitive Micro-Mechanic Gyroscope
A micro-mechanic gyroscope design, which is used electrostatic comb driven, grid structure and capacitive detection, as well as its working principle, was proposed. Simulation and mode analysis using ANSYS were done while the simulation was consistent with theory. This gyroscope was designed and manufactured by body silicon technique, and after packaged, we got this gyroscope finally. The preliminary experiment test result showed that the first natural frequency is 4.06 kHz, and its sensitivity is 0.0279V//s.
Zhengyi Jiang and Chunliang Zhang
Y. B. Shi et al., "Study on a Capacitive Micro-Mechanic Gyroscope", Advanced Materials Research, Vols. 97-101, pp. 4478-4481, 2010