[1]
C. Acar, A. M. Shkel. An Approach for Increasing Drive-Mode Bandwidth of MEMS Vibratory Gyroscopes. Journal of Micro Electro Mechanical Systems. 2005, 14(3): 520~528.
DOI: 10.1109/jmems.2005.844801
Google Scholar
[2]
D. Tsai, W. Fang. Design and Simulation of a Dual-Axis Sensing Decoupled Vibratory Wheel Gyroscope. Sensors and Actuators, A: Physical. 2006, 126(1): 33-40.
DOI: 10.1016/j.sna.2005.09.004
Google Scholar
[3]
B. Xiong, L. Che, Y. Wang. A Novel Bulk Micromachined Gyroscope with Slots Structure Working at Atmosphere. Sensors and Actuators, A: Physical. 2003, 107: 137~145.
DOI: 10.1016/s0924-4247(03)00296-6
Google Scholar
[4]
K. Tanaka, Y. Mochida, M. Sugimoto, K. Moriya, T. Hasegawa, K. Atsuchi, K. Ohwada. A Micromachined Vibrating Gyroscope. Sensors and Actuators, A: Physical. 1995, 50(1-2): 111-115.
DOI: 10.1016/0924-4247(96)80093-8
Google Scholar
[5]
Y. S. Oh, B. L. Lee, S. S. Baek, H. S. Kim, J. G. Kim, S. G. Kang, and C. M. Song. A Tunable Vibratory Microgyroscope. Sensors and Actuators, A: Physical. 1998, 64(1): 51-56.
DOI: 10.1016/s0924-4247(98)80057-5
Google Scholar
[6]
J. S. Yang. A Piezoelectric Gyroscope Based on Extensional Vibrations of Rods. International Journal of Applied Electromegnetics. 2003, 17(4): 289~300.
DOI: 10.3233/jae-2003-266
Google Scholar
[7]
X. Wu, W. Chen, X. Zhao. Structure Design of Levitating Coil in Micro-machined Gyroscope with an Electro-magnetic Levitated Rotor. Journal of Shanghai Jiaotong University. 2005, 23(1): 125~128.
Google Scholar
[8]
W. A. Clark, R. T. Howe, R. Horowitz. Surface Micromachined Z-axis Vibratory Rate Gyroscope. Tech. Dig. Solid-state Sensors and Actuators Workshop. Los Angeles, United States, 1996: 283-287.
DOI: 10.31438/trf.hh1996.64
Google Scholar
[9]
S. E. Alper, I. E. Ocak, T. Akin. Ultra-Thick and High-Aspect-Ratio Nickel Microgyroscope Using EFAB TM Multi-Layer Additive Electroforming. MEMS, Istanbul, Turkey, 2006: 670-673.
DOI: 10.1109/memsys.2006.1627888
Google Scholar