Research on the Effects of the Capillary Wall and the Different Flow Rate to the Process of the Drop Formation in the Developing Nozzle

Xue Ping Liu; Han Wang; Qiang Xu

doi:10.4028/www.scientific.net/AMR.997.599

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 997Research on the Effects of the Capillary Wall and...

Research on the Effects of the Capillary Wall and the Different Flow Rate to the Process of the Drop Formation in the Developing Nozzle

Abstract:

In the process of integrated circuit manufacturing, the uniformity of the development process is very important, and the key point is to make sure the stability of the frequency and the volume of the drop flowing out of the capillaries of the developing nozzle. The process of the drop formation is governed by the Navier-Stocks equation, which is solved by the finite volume method, and the structured grid is meshed for the axial symmetry model of the capillary. And then the interface of the two different phases, vapor phase and liquid phase, is tracked by the model of VOF(volume of fluid). The influence of the liquid phase velocity in the capillary to the frequency and the volume of drop is analyzed, also the effects of the capillary wall to the process of the drop formation were studied. The results of the research are useful for the designers to design the capillaries structure in the developing nozzle.

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Periodical:

Advanced Materials Research (Volume 997)

Pages:

599-604

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.997.599

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Online since:

August 2014

Authors:

Xue Ping Liu, Han Wang*, Qiang Xu

Keywords:

Drop Formation, Two-Phase Model, Volume of Fluid

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