Fundamental Study on Oblique Impact Drive Stage for Ultra Precision Positioning

Shigeru Sakuta; Yusuke Takada

doi:10.4028/p-yNS647

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Fundamental Study on Oblique Impact Drive Stage for Ultra Precision Positioning
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HomeAdvances in Science and TechnologyAdvances in Science and Technology Vol. 157Fundamental Study on Oblique Impact Drive Stage...

Fundamental Study on Oblique Impact Drive Stage for Ultra Precision Positioning

Abstract:

A new ultra-precision positioning system is introduced in this paper. Experiment results show that using oblique impact drive, stage can be positioned in one axis as well as rotated around one axis by one actuator, that is, 'One-actuator-two-motion'. This means that simpler positioning system is possible, resulting in compact system, less components, more reliability, less costly system, which lead to SDGs.

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Periodical:

Advances in Science and Technology (Volume 157)

Pages:

93-98

DOI:

https://doi.org/10.4028/p-yNS647

Citation:

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Online since:

September 2024

Authors:

Shigeru Sakuta*, Yusuke Takada

Keywords:

Capacitance Gauge, Discontinuous Voltage Profile, Friction, Impact Drive, Inertial Force, Oblique Force, One-Actuator-Two-Motion, Piezoelectric Actuator, Rotation Control, Stage Control, Ultra-Precise Positioning

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* - Corresponding Author

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