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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 103-105Impurity Diffusion in Silicon under Strong...

Impurity Diffusion in Silicon under Strong Interaction with the Point Defect Clusters

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Defects in Semiconductors I

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Periodical:

Defect and Diffusion Forum (Volumes 103-105)

Pages:

239-242

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.103-105.239

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Online since:

January 1993

Authors:

V.I. Pashkov, V.A. Perevoshchikov, V.D. Skupov

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© 1993 Trans Tech Publications Ltd. All Rights Reserved

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