Impurity Diffusion in Silicon under Strong Interaction with the Point Defect Clusters

Abstract:

Article Preview

Info:

Periodical:

Defect and Diffusion Forum (Volumes 103-105)

Edited by:

Nickolay T. Bagraev

Pages:

239-242

Citation:

V.I. Pashkov et al., "Impurity Diffusion in Silicon under Strong Interaction with the Point Defect Clusters", Defect and Diffusion Forum, Vols. 103-105, pp. 239-242, 1993

Online since:

January 1993

Export:

Price:

$38.00