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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 115-116Photo-Acoustic Displacement Measurements for...

Photo-Acoustic Displacement Measurements for Characterization of Subsurface Defects in Silicon

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Defect and Diffusion Forum Vols. 115-116

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Periodical:

Defect and Diffusion Forum (Volumes 115-116)

Pages:

85-0

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.115-116.85

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Online since:

January 1994

Authors:

Shingo Sumie, Hiroyuki Takamatsu, Taneo Nishino

Keywords:

Interferometer, Photothermal Displacement, Plasma Etching Damage, Polishing Damage, Silicon, Thermal Expansion

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Сopyright:

© 1994 Trans Tech Publications Ltd. All Rights Reserved

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