Photo-Acoustic Displacement Measurements for Characterization of Subsurface Defects in Silicon

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Periodical:

Defect and Diffusion Forum (Volumes 115-116)

Edited by:

David J. Fisher

Pages:

85-0

DOI:

10.4028/www.scientific.net/DDF.115-116.85

Citation:

S. Sumie et al., "Photo-Acoustic Displacement Measurements for Characterization of Subsurface Defects in Silicon", Defect and Diffusion Forum, Vols. 115-116, pp. 85-0, 1994

Online since:

January 1994

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$35.00

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