Transient Diffusion Phenomena due to Ion Implantation Damage

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Periodical:

Defect and Diffusion Forum (Volumes 115-116)

Edited by:

David J. Fisher

Pages:

53-84

DOI:

10.4028/www.scientific.net/DDF.115-116.53

Citation:

B. Baccus and E. Vandenbossche, "Transient Diffusion Phenomena due to Ion Implantation Damage", Defect and Diffusion Forum, Vols. 115-116, pp. 53-84, 1994

Online since:

January 1994

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$35.00

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