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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 117-118Superdiffusion in Semiconductors (Electron-Beam...

Superdiffusion in Semiconductors (Electron-Beam Doping)

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Defect and Diffusion Forum Vols. 117-118

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Periodical:

Defect and Diffusion Forum (Volumes 117-118)

Pages:

13-44

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.117-118.13

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Online since:

January 1995

Authors:

Takao Wada

Keywords:

Electron Beam Doping, Electron Irradiation, Enhanced Diffusion, Surface Diffusion

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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