Superdiffusion in Semiconductors (Electron-Beam Doping)

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Periodical:

Defect and Diffusion Forum (Volumes 117-118)

Edited by:

David J. Fisher

Pages:

13-44

DOI:

10.4028/www.scientific.net/DDF.117-118.13

Citation:

T. Wada "Superdiffusion in Semiconductors (Electron-Beam Doping) ", Defect and Diffusion Forum, Vols. 117-118, pp. 13-44, 1995

Online since:

January 1995

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