Reconstruction Mechanisms in Ion Implanted and Annealed Silicon Wafers

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Periodical:

Defect and Diffusion Forum (Volumes 117-118)

Edited by:

David J. Fisher

Pages:

45-64

DOI:

10.4028/www.scientific.net/DDF.117-118.45

Citation:

C. Christofides et al., "Reconstruction Mechanisms in Ion Implanted and Annealed Silicon Wafers ", Defect and Diffusion Forum, Vols. 117-118, pp. 45-64, 1995

Online since:

January 1995

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$35.00

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