Si: Surface Reconstruction
a.92
a.92
Si: Surface Reconstruction
a.93
a.93
Si: Defect Annealing
a.94
a.94
Si/Ge: Interdiffusion
a.95
a.95
Si/SiN: Interfacial Defects
a.96
a.96
Si/SiO2: Point Defects and Stacking Faults
a.97
a.97
SiGe: Electron Irradiation and Point Defects
a.98
a.98
SiGe: Electron Irradiation and Point Defects
a.99
a.99
SiGe: Ion Bombardment and Point Defects
a.100
a.100
Si/SiN: Interfacial Defects
Page: A96