Si: Surface Defects
a.102
Si: Surface Defects
a.103
Si: Surface Defects
a.104
Si: Surface Defects
a.105
Si: Surface Defects and Surface Reconstruction
a.106
Si/SiO2: Dislocations
a.107
Si/SiO2: Point Defects
a.108
SiGe: Interdiffusion
a.109
SiGe: Ion Implantation and Point Defects
a.110