Si: Surface Defects
a.105
a.105
Si: Surface Defects and Surface Reconstruction
a.106
a.106
Si/SiO2: Dislocations
a.107
a.107
Si/SiO2: Point Defects
a.108
a.108
SiGe: Interdiffusion
a.109
a.109
SiGe: Ion Implantation and Point Defects
a.110
a.110
SiGe, SiGeC: Ion Implantation and Point Defects
a.111
a.111
SiGe: Dislocations
a.112
a.112
SiGe/Si: Ion Implantation and Dislocations
a.113
a.113
SiGe: Interdiffusion
Page: A109