Si/SiO2: Point Defects
a.108
a.108
SiGe: Interdiffusion
a.109
a.109
SiGe: Ion Implantation and Point Defects
a.110
a.110
SiGe, SiGeC: Ion Implantation and Point Defects
a.111
a.111
SiGe: Dislocations
a.112
a.112
SiGe/Si: Ion Implantation and Dislocations
a.113
a.113
SiGe/Si: Ion Implantation, Point Defects, and Defect Annealing
a.114
a.114
SiGe/Si: Dislocations and Stacking Faults
a.115
a.115
ZnSSe/GaAs: Dislocations
a.116
a.116
SiGe: Dislocations
Page: A112