Theory of Enhanced/Retarded Diffusion of Donor/Acceptor Dopants in Predoped Silicon

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Periodical:

Defect and Diffusion Forum (Volumes 171-172)

Edited by:

D.J. Fisher

Pages:

45-60

DOI:

10.4028/www.scientific.net/DDF.171-172.45

Citation:

E. Antoncik "Theory of Enhanced/Retarded Diffusion of Donor/Acceptor Dopants in Predoped Silicon", Defect and Diffusion Forum, Vols. 171-172, pp. 45-60, 1999

Online since:

June 1999

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