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Abstracts
SiON/Si: Interface Defects
a.256
TaN: Diffusion
a.257
TaN, TiN, WxN: Cu Diffusion
a.258
TiN: Cu Diffusion
a.259
TiN: Cu, Si Diffusion
a.260
TiZrN: Cu Diffusion
a.261
TiZrN: Cu Diffusion
a.262
Al10BaMgO17, Al11BaO17: Point Defects
a.263
Al2O3: Al, O Diffusion
a.264

TiN: Cu, Si Diffusion

Page: A260

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