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Abstracts
MoxN: Cu, Si Diffusion
a.252
RuTiN: O Diffusion
a.253
SiNx, SiO2: V Diffusion
a.254
SiON/Si: Interface Defects
a.255
SiON/Si: Interface Defects
a.256
TaN: Diffusion
a.257
TaN, TiN, WxN: Cu Diffusion
a.258
TiN: Cu Diffusion
a.259
TiN: Cu, Si Diffusion
a.260

SiON/Si: Interface Defects

Page: A256

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