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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 251-252Modelling of the Gettering by Mechanical Damage of...

Modelling of the Gettering by Mechanical Damage of the Metallic Impurities in Silicon

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Defects and Diffusion Ceramics Abstracts

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Periodical:

Defect and Diffusion Forum (Volumes 251-252)

Pages:

27-34

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.251-252.27

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Online since:

March 2006

Authors:

F. Ayad, M. Remram

Keywords:

Gettering, Metallic Impurities, Modeling, Silicon

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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