Modelling of the Gettering by Mechanical Damage of the Metallic Impurities in Silicon

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Periodical:

Defect and Diffusion Forum (Volumes 251-252)

Edited by:

David J. Fisher

Pages:

27-34

DOI:

10.4028/www.scientific.net/DDF.251-252.27

Citation:

F. Ayad and M. Remram, "Modelling of the Gettering by Mechanical Damage of the Metallic Impurities in Silicon", Defect and Diffusion Forum, Vols. 251-252, pp. 27-34, 2006

Online since:

March 2006

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$35.00

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