The Influence of External Load and Air Pressure on Air Slide Table Performance of Ultra Precision Machines in Nano Machining
Ultra precision machine tools are used in nano machining technology. Two main assemblies creating rotational and linear motion, called air spindle and linear air table are used in these machines. The linear air table has been simulated experimentally like a linear air bearing. This bearing moves in the main direction, X, while it has straightness error motions in Y and Z directions. The error values vary due to different parameters. This investigation deals with the influential parameters and their proportion in the error value. As far as the two mating surfaces are separated by a thin layer of pressurized air, the air pressure, location and amount of external load, are some of the parameters which have been studied. Results show that the more air pressure, the more stability and stiffer table. There will be less error motions as well. The error amount is not the same in X and Y directions. Finally, in order to have linear stiffness, the optimum air pressure, external load, and load location have been decided.
Andreas Öchsner, Graeme E. Murch and Ali Shokuhfar
M. Vahdati et al., "The Influence of External Load and Air Pressure on Air Slide Table Performance of Ultra Precision Machines in Nano Machining", Defect and Diffusion Forum, Vols. 283-286, pp. 177-182, 2009