The development of new power generation plants firing fossil fuel is aiming at achieving higher thermal efficiencies of the energy conversion process. The major factors affecting the efficiency of the conventional steam power plants are the temperature and, to a lesser extent, the pressure of the steam entering the turbine. The increased operating temperature and pressure require new materials that have major oxidation resistance. Due to this problem, in the last years numerous studies have been conducted in order to develop new coatings to enhance the resistance of steels with chromium contents between 9 and 12% wt against steam oxidation in order to allow operation of steam turbines at 650 0C. In this study, Si protective coatings were deposited by CVD-FBR on ferritic steel P-91. These type of coatings have shown to be protective at 650 0C under steam for at least 3000 hours of laboratory steam exposure under atmospheric pressure. Morphology and composition of coatings were characterized by different techniques, such as scanning electron microscopy (SEM), electron probe microanalysis, and X-ray diffraction (XRD). The results show a substantial increase of steam oxidation protection afforded by Si coating by CVD-FBR process.