Abstracts

FeSi2: Ga Diffusion
a.501

Garnet: Sm Diffusion
a.502

HfO2, ZrO2: Cl Diffusion
a.503

HfO2, ZrO2: O Diffusion
a.504

Oxygen Diffusion in Atomic Layer Deposited ZrO2 and HfO2 Thin Films on Si (100). S.Ferrari, G.Scarel: Journal of Applied Physics, 2004, 96[1], 144-9
a.505

HfO2: B, O Diffusion
a.506

Hf(Si,O,N): As, P Diffusion
a.507

IrO2: O Diffusion
a.508

(La,Ca)CrO3: Ca Grain Boundary Diffusion
a.509

HomeDefect and Diffusion ForumSIMS Diffusion StudiesOxygen Diffusion in Atomic Layer Deposited ZrO2...

Oxygen Diffusion in Atomic Layer Deposited ZrO2 and HfO2 Thin Films on Si (100). S.Ferrari, G.Scarel: Journal of Applied Physics, 2004, 96[1], 144-9

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