Plasma Polymerization of Hexamethyldisiloxane and Tetraethoxysilane Thin Films for Humidity Sensing Application

N. Guermat; A. Bellel; Salah Sahli; Yvan Segui; Patrice Raynaud

doi:10.4028/www.scientific.net/DDF.354.41

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Plasma Polymerization of Hexamethyldisiloxane and Tetraethoxysilane Thin Films for Humidity Sensing Application

Abstract:

Humidity sensitive layers elaborated from pure HMDSO and TEOS by PECVD technique have been studied. Humidity sensing properties including impedance relative humidity (RH) and current RH characteristics were investigated. TEOS films show higher sensitivity and excellent linearity over the explored range of humidity (20–95% RH). However, HMDSO films exhibits a small response and recovery of about 8 and 34 s for humidification and desiccation, respectively, in addition to very low hysteresis (2%). Structural analyses of sensitive layers were characterized by Fourier transform infrared spectroscopy (FTIR).

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Periodical:

Defect and Diffusion Forum (Volume 354)

Pages:

41-47

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.354.41

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Online since:

June 2014

Authors:

N. Guermat*, A. Bellel, Salah Sahli, Yvan Segui, Patrice Raynaud

Keywords:

Electrical Characterization, HMDSO, Humidity Sensor, TEOS

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References

[1] I. Fratoddi, P. Altamura, A. Bearzotti, A. Furlani, M.V. Russo, Thin Solid Films Vol. 458 (2004), p.292–298.

DOI: 10.1016/j.tsf.2003.12.065

Google Scholar

[2] M. Almasi Kashi, A. Ramazani, H. Abbasian, A. Khayyatian, Sensors and Actuators A Vol. 174 (2012), p.69–74.

DOI: 10.1016/j.sna.2011.11.033

Google Scholar

[3] Y. Jun Liu, J. Shi, F. Zhang, H. Liang, J. Xu, A. Lakhtakia, S. J. Fonash, T. Jun Huang, Sensors and Actuators B Vol. 15 (2011), p.593– 598.

Google Scholar

[4] E. Radeva, K. Bobev and L. Spassov, Sensors and Actuators B Vol. 8 (1992), pp.21-25.

Google Scholar

[5] M. Loughran, S.W. Tsai, K. Yokoyama, I. Karube, Current Applied Physics Vol. 3 (2003), p.495–499.

Google Scholar

[6] D. Patil, Y.K. Seo, Y. K. Hwang, J. S. Chang, P. Patil, Sensors and Actuators Vol. B 132 (2008), p.116–124.

Google Scholar

[7] R.A.M. Carvalho, R.R. Lima, A.P. Nascimento Filho, M.L.P. Silva, N.R. Demarquette, Sensors and Actuators Vol. B 108 (2005), p.955–963.

DOI: 10.1016/j.snb.2004.12.117

Google Scholar

[8] N. Guermat, A. Bellel, S. Sahli, Y. Segui, P. Raynaud, M. J. Condensed Matter Vol. 12 (2010), pp.208-212.

Google Scholar

[9] N. Guermat, A. Bellel, S. Sahli, Y. Segui, P. Raynaud, Thin Solid Films Vol. 517 (2009), p.4455–4460.

DOI: 10.1016/j.tsf.2009.01.084

Google Scholar

[10] S. Agarwal, G.L. Sharma, Sens. Actuators Vol. B 85 (2002), p.205–211.

Google Scholar

[11] M. S. Gong, S. W. Joo, B. K. Choi, Sensors and Actuators Vol. B 86 (2002), p.81–87.

Google Scholar

[12] C. T. Wang, C. L. Wu, Thin Solid Films Vol. 496 (2006), pp.658-664.

Google Scholar

[13] G. Sun, G. Grundmeier, Thin Solid Films Vol. 515 (2006), p.1266–1274.

Google Scholar

[14] K. Sanom, S. Hayashi, S. Wickramanayaka, Y. Hatanaka, Thin Solid Films Vols. 281-282 (1996), pp.397-4001.

DOI: 10.1016/0040-6090(96)08701-9

Google Scholar