Influence of Deposition Parameters on the Properties of Nanocomposite Coatings Prepared by Cathodic Arc Evaporation

Abstract:

The article deals with the influence of different deposition parameters on the selected properties of AlCrN/Si₃N₄ nanocomposite coatings. Bias voltage, cathodes currents and working gas pressure were changed during the deposition process. All coatings were deposited using Lateral Rotating Cathodes (LARC^®) process that belongs to the group of cathodic arc evaporation PVD technologies. In comparison with the typical cathodic arc evaporation process which usually uses planar targets the LARC^® process utilizes rotational cathodes that are positioned close to each other. Nanohardness, Young's modulus, thickness and residual stresses were determinated in order to evaluate the influence of deposition parameters on these coatings properties

• Periodical: Defect and Diffusion Forum (Volume 368)
• Pages: 77-81
• DOI: https://doi.org/10.4028/www.scientific.net/DDF.368.77
• Online since: July 2016
• Authors: Miroslav Béger*, Jozef Sondor, Martin Sahul, Paulína Zacková, Marián Haršáni, Ľubomír Čaplovič
• Keywords: Alcrn/Si₃N₄ (nACRo^4®) Coating, Nanohardness Testing, Phase Composition, PVD Deposition

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