The Impact of the Deposition Parameters on the Mechanical Properties of Thin Carbon Layers

Abstract:

The article describes the effect of the pressure in the chamber during the deposition of thin layers on the basic mechanical properties of thin layers based on carbon. Monitoring parameters are mainly nanohardness, coefficient of friction and adhesion between the layer and substrate. This parameters are observed using nanohardness tester and scratch tester. All observed layers had the same thickens of layers. Carbon layers generally have poor adhesion to the substrate. To improve the adhesion, is used the interlayer of titanium which is between the substrate and carbon layer. Carbon layers are mostly used for their very good sliding properties especially in cases where can not be used process fluids or where is necessary to reduce the friction between the two materials. The carbon layer can also be used in medicine (for their biocompatibility), for machine tools (for their hardness and abrasion resistance) or as barriers layers (for their high chemical resistance).

• Periodical: Defect and Diffusion Forum (Volume 368)
• Pages: 95-98
• DOI: https://doi.org/10.4028/www.scientific.net/DDF.368.95
• Online since: July 2016
• Authors: Lukáš Voleský*, Totka Bakalova, Karolína Borůvková, Petr Louda
• Keywords: Adhesion, Carbon, Layers, Mechanical Properties, Plasma Treatment

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