Mechanical Properties of Ni-Pd Thin Films Fabricated by LIGA Process

Yoshiyuki Ichinosawa; Seichin Kinuta; Yasunori Saotome

doi:10.4028/www.scientific.net/DDF.382.68

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Mechanical Properties of Ni-Pd Thin Films Fabricated by LIGA Process

Abstract:

Palmtop tensile and fatigue testing machines were developed in-house for small and thin specimens that were fabricated by the LIGA process. The dimensions of the specimens were selected in accordance with the international standard IEC62047-3, and were 10 micrometers in thickness, 20 micrometers in width, and 500 micrometers in parallel length. Since the loading mechanism and methods of measuring the load and displacement were specially designed, the stiffness of the specimen is quite low compared to that of the conventional large-size specimens. The mechanical properties of electroformed Ni₂Pd₈ and Ni₄Pd₆ alloys were studied with these developed testing machines and excellent values of tensile and fatigue strengths of 2.7 GPa and 1.8 GPa, respectively were obtained in the case of the Ni₄Pd₆ alloy.

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Periodical:

Defect and Diffusion Forum (Volume 382)

Pages:

68-72

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.382.68

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Online since:

January 2018

Authors:

Yoshiyuki Ichinosawa, Seichin Kinuta, Yasunori Saotome*

Keywords:

Electrodeposition, Electroforming, MEMS Material, Microfactory, Micromaterial, Ni-Pd Alloy, Thin Film, UV-LIGA Process

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References

[1] S.M. Allameh, J. Lou, F. Kavishe, T. Buchheit and W.O. Soboyejo : Mater. Sci. Eng. A 371(2004) 256-266.

Google Scholar

[2] H.S. Cho, K.J. Hemker, K. Lian, J. Goettert and G. Dirras : Sens. and Actuators A, 103(2003) 59-63.

DOI: 10.1016/s0924-4247(02)00314-x

Google Scholar

[3] T. Tsuchiya, M. Hirata, N. Chiba, R. Udo, Y. Yoshitomi,T. Ando, K. Sato, K. Takashima,Y. Higo, Y. Saotome, H. Ogawa and K. Ozaki : J. Microelectromechanical Systems, 14(2005) 1178-1186.

DOI: 10.1109/jmems.2005.851820

Google Scholar

[4] Y. Saotome, S. Yokote, T. Okamoto and S. Kinuta : Proc. 16th Annual Int. Conf. on MEMS, 16(2003) 670-673.

Google Scholar

[5] T. Tanaka, (Ed) et al, Data book fatigue strength of metallic materials 2(1982), code-series 251-003, 331-023(The Soc. Mater. Sci., Japan).

Google Scholar

[6] K. Fujita, T. Suidu and T. Yamasaki : J. Japan Inst. Metals, 75(2011), 348-354.

Google Scholar

[7] K. Fujita, K. Nagaoka, T. Suidu, T. Nabeshima and T. Yamasaki : J. Japan Inst. Metals, 77(2013) 192-197.

Google Scholar