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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 57-58Ion Implantation in Oxides on Silicon

Ion Implantation in Oxides on Silicon

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Ion Implantation 1988

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Periodical:

Defect and Diffusion Forum (Volumes 57-58)

Pages:

431-443

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.57-58.431

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Online since:

January 1988

Authors:

A. Vengurlekar

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© 1988 Trans Tech Publications Ltd. All Rights Reserved

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