Amorphization-Crystallization of Semiconductors during Ion Implantation as a Non-Equilibrium Phase Transitions

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Edited by:

I.V. Verner, N.N. Gerasimenko and J.W. Corbett

Pages:

170-0

DOI:

10.4028/www.scientific.net/DDF.90.170

Citation:

I. V. Verner et al., "Amorphization-Crystallization of Semiconductors during Ion Implantation as a Non-Equilibrium Phase Transitions", Defect and Diffusion Forum, Vol. 90, pp. 170-0, 1992

Online since:

January 1992

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