Characterization of Diamond Replicas Microfabricated Using Silicon Molds

Abstract:

• Periodical: Journal of Metastable and Nanocrystalline Materials (Volumes 20-21)
• Pages: 195-200
• DOI: https://doi.org/10.4028/www.scientific.net/JMNM.20-21.195
• Online since: July 2004
• Authors: D.R. Martins, M.C. Salvadori, R.D. Mansano, P. Verdonck
• Keywords: Atomic Force Microscope (AFM), Diamond, Micro-Fabrication, Microstructure

References

[1] T. Cagin, J. W. Che, M. N. Gardos, A. Fijany, W. A. Goddard. Nanotechnology 10(3), pp.278-284 (1999).

[2] J. L. Davidson, W. P. Kang, Y Gurbuz, K. C. Holmes, L. G. Davis, A. Wisitsora-at, D. V. Kerns, R. L. Eidson , T. Henderson. Diamond and Related Materials 8(8-9), pp.1741-1747 (1999).

DOI: 10.1016/s0925-9635(99)00082-5

[3] E. Kohn, P. Gluche, M. Adamschik. Diamond and Related Materials 8(2-5), pp.934-940 (1999).

DOI: 10.1016/s0925-9635(98)00294-5

[4] R. Ramesham. Thin Solid Films 340(1-2), pp.1-6 (1999).

[5] R. Ramesham, C. D. Ellis, J. D. Olivas, S. Bolin. Thin Solid Films 330(2), pp.62-66 (1999).

DOI: 10.1016/s0040-6090(98)00825-6

[6] S. Silva, M.C. Salvadori, K. Kawakita, M.T. Pereira, W. Rossi, M. Cattani - Fabrication of diamond flow controller micronozzles,. Diamond and Related Materials 11, 237-241 (2002).

DOI: 10.1016/s0925-9635(01)00693-8

[7] S. Silva, M. C. Salvadori, K. Kawakita, M. T. Pereira, R. M. Galvão and M. Cattani - Diamond flow controller microtubes,. Journal of Micromechanics and Microengineering 12, 108-110 (2002).

DOI: 10.1088/0960-1317/12/2/302

[8] M. J. Madou - Fundamentals of Microfabrication,. CRC Press, New York (2001).

[9] M. C. Salvadori, V. P. Mammana, O. G. Martins, F. T. Degasperi. Plasma Sources Science and Technology 4, pp.489-493 (1995).

[10] H. Bjorkman, P. Rangsten, P. Hollman, K. Hjort. Sensors and actuactors A- Physical 73(1-2), pp.24-29 (1999).

[11] V. G. Ralchenko, A. V. Baranov, I. I. Vlasov, V. I. Konov. Physica Status Solidi A- Applied Research 174(1), pp.171-1767 (1999).

[12] M. C. Salvadori, M. Cattani, V. Mammana, O. R. Monteiro, J. W. Ager III, I. G. Brown. Thin Solid Films 290-291, pp.157-160 (1996).

DOI: 10.1016/s0040-6090(96)09010-4

[13] V. P. Mammana, R. Mansano, P. Verdonck, A. Pavani Filho, M. C. Salvadori. Diamond and Related Materials 6, pp.1824-1829 (1997).

DOI: 10.1016/s0925-9635(97)00145-3

[14] V. P. Mammana, M. C. Salvadori, I. G. Brown. Thin Solid Films 308-309, pp.258-262 (1997).

DOI: 10.1016/s0040-6090(97)00379-9

[15] M. A. Brewer, I. G. Brown, M. R. Dickinson, J. E. Galvin, R. A. MacGill, M. C. Salvadori. Rev. Sci. Instrum. 63 (6), 3389-3392 (1992).

[16] A.M. Pizzo Passaro, M.C. Salvadori, D.R. Martins, M. Cattani. Thin Solid Films 377-378, 285-9 (2000).

DOI: 10.1016/s0040-6090(00)01332-8