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HomeKey Engineering MaterialsKey Engineering Materials Vols. 132-136In Situ Study of Chemical Reactions during Growth...

In Situ Study of Chemical Reactions during Growth of TiN Layer from Gas Phase

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Euro Ceramics V

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Periodical:

Key Engineering Materials (Volumes 132-136)

Pages:

1560-1563

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.132-136.1560

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Online since:

April 1997

Authors:

Stanisława Jonas, W.S. Ptak, Edward Walasek, I. Holyst, A. Czyżewska

Keywords:

CVD Process, FT-IR, Ti_xN_y Layers

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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