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HomeKey Engineering MaterialsKey Engineering Materials Vols. 159-160Synthesis of Adhesive Silicon Nitride Thin Films...

Synthesis of Adhesive Silicon Nitride Thin Films by Static and Dynamic Ion Mixing Methods

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Periodical:

Key Engineering Materials (Volumes 159-160)

Pages:

293-298

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.159-160.293

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Online since:

May 1998

Authors:

Y. Shima, H. Hasuyama, T. Hiramitsu, W.-Y. Fan, Y. Imaoka, Takanori Watari, K. Baba, R. Hatada

Keywords:

Adhesion, Dynamic Ion Mixing, Static Ion Mixing, Thin Film

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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