Synthesis of Adhesive Silicon Nitride Thin Films by Static and Dynamic Ion Mixing Methods

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Periodical:

Key Engineering Materials (Volumes 159-160)

Edited by:

Hiroshige Suzuki, Katsutoshi Komeya and Keizo Uematsu

Pages:

293-298

DOI:

10.4028/www.scientific.net/KEM.159-160.293

Citation:

Y. Shima et al., "Synthesis of Adhesive Silicon Nitride Thin Films by Static and Dynamic Ion Mixing Methods", Key Engineering Materials, Vols. 159-160, pp. 293-298, 1999

Online since:

May 1998

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Price:

$35.00

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