Formation of Magnesium Oxide Thin Films by Reactive Sputtering

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Periodical:

Key Engineering Materials (Volumes 159-160)

Edited by:

Hiroshige Suzuki, Katsutoshi Komeya and Keizo Uematsu

Pages:

299-304

Citation:

K. Irie et al., "Formation of Magnesium Oxide Thin Films by Reactive Sputtering", Key Engineering Materials, Vols. 159-160, pp. 299-304, 1999

Online since:

May 1998

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Price:

$38.00

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