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HomeKey Engineering MaterialsKey Engineering Materials Vols. 175-176Composition and Morphology Control of Si-C-N...

Composition and Morphology Control of Si-C-N Powders by CVD Method

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Periodical:

Key Engineering Materials (Volumes 175-176)

Pages:

49-56

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.175-176.49

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Online since:

October 1999

Authors:

Štefan Kavecký, B. Janeková, Pavol Šajgalík

Keywords:

Chemical Vapor Deposition (CVD), Powder, Silicon Carbide (SiC)

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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