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HomeKey Engineering MaterialsKey Engineering Materials Vols. 202-203Investigation of an Atomic Force Microscope...

Investigation of an Atomic Force Microscope Diamond Tip Wear in Micro/Nano-Machining

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Periodical:

Key Engineering Materials (Volumes 202-203)

Pages:

315-320

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.202-203.315

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Online since:

June 2001

Authors:

Q.L. Zhao, Shen Dong, T. Sun

Keywords:

Atomic Force Microscope (AFM), Chemical Wear, Diamond Tip, Micro/Nano Machining, Single Crystal Silicon

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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