Crystallisation and Tetragonal-Monoclinic Transformation in ZrO2 and HfO2 Dielectric Thin Films

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Periodical:

Key Engineering Materials (Volumes 206-213)

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Edited by:

C. Kermel, V. Lardot, D. Libert and I. Urbain

Pages:

1285-1288

Citation:

C. Zhao et al., "Crystallisation and Tetragonal-Monoclinic Transformation in ZrO2 and HfO2 Dielectric Thin Films", Key Engineering Materials, Vols. 206-213, pp. 1285-1288, 2002

Online since:

December 2001

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