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HomeKey Engineering MaterialsKey Engineering Materials Vols. 206-213Crystallisation and Tetragonal-Monoclinic...

Crystallisation and Tetragonal-Monoclinic Transformation in ZrO₂ and HfO₂ Dielectric Thin Films

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Euro Ceramics VII

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Periodical:

Key Engineering Materials (Volumes 206-213)

Pages:

1285-1288

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.206-213.1285

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Online since:

December 2001

Authors:

Chao Zhao, Gert Roebben, Marc Heyns, Omer Van der Biest

Keywords:

Crystallization, HfO₂, High-K Gate Stacks, Thin Film, Zro₂

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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