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HomeKey Engineering MaterialsKey Engineering Materials Vols. 224-226Manufacturing Miniature Si-Based Ceramic Rotors by...

Manufacturing Miniature Si-Based Ceramic Rotors by Micro Reaction Sintering

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High-Performance Ceramics 2001

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Periodical:

Key Engineering Materials (Volumes 224-226)

Pages:

703-708

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.224-226.703

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Online since:

June 2002

Authors:

Jing Feng Li, Shinya Sugimoto, Shuji Tanaka, Ryuzo Watanabe, Masayoshi Esashi

Keywords:

Ceramic Microfabrication, Reaction Sintering, Silicon Carbide (SiC)

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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