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HomeKey Engineering MaterialsKey Engineering Materials Vols. 230-232Gas-Sensitive Response of SnO2 Thin-Film Sensors...

Gas-Sensitive Response of SnO₂ Thin-Film Sensors Produced by Reactive DC Magnetron Sputtering

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Advanced Materials Forum I

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Periodical:

Key Engineering Materials (Volumes 230-232)

Pages:

388-391

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.230-232.388

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Online since:

October 2002

Authors:

J.M. Correia-Pires, J.B. Almeida, Vasco Teixeira

Keywords:

Gas Sensitivity, Reactive Magnetron Sputtering, TiN Oxide

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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